Comprehensive Performance Evaluation of 18 Perfluoroelastomers O-Ring Models for Semiconductor Manufacturing
Zhanfeng Guo; He Tian; Tian-Ling Ren
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/edtm61175.2025.11040447
The original publisher provides the full text and its access options.
Cite this source
Zhanfeng Guo; He Tian; Tian-Ling Ren. Comprehensive Performance Evaluation of 18 Perfluoroelastomers O-Ring Models for Semiconductor Manufacturing. 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2025-03-09. https://doi.org/10.1109/edtm61175.2025.11040447