Molecular dynamics simulations in semiconductor material processing: A comprehensive review
Yixin Yun; Shujing Wu; Dazhong Wang; Xiangcheng Luo; Jiapeng Chen; Guoqiang Wang; Akiyama Takao; Lei Wan
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Measurement
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.measurement.2024.115708
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Cite this source
Yixin Yun; Shujing Wu; Dazhong Wang; Xiangcheng Luo; Jiapeng Chen; Guoqiang Wang; Akiyama Takao; Lei Wan. Molecular dynamics simulations in semiconductor material processing: A comprehensive review. Measurement. 2025-02. https://doi.org/10.1016/j.measurement.2024.115708