LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing
Hongquan He; Zhen Wang; Jingya Wang; Tao Wu; Xuming He; Bei Yu; Jingyi Yu; Hao GENG
- Published
- Publisher
- Neural Information Processing Systems Foundation, Inc. (NeurIPS)
- Journal / collection
- Advances in Neural Information Processing Systems 38
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.52202/085713-5259
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Cite this source
Hongquan He; Zhen Wang; Jingya Wang; Tao Wu; Xuming He; Bei Yu; Jingyi Yu; Hao GENG. LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing. Advances in Neural Information Processing Systems 38. 2025. https://doi.org/10.52202/085713-5259