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Research literature / Conference paper

Towards improved semiconductor defect inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS

Ying-Lin Chen; Jacob Deforce; Vic De Ridder; Bappaditya Dey; Victor M. Blanco Carballo; Sandip Halder; Philippe Leray

Published
Publisher
SPIE
Journal / collection
Metrology, Inspection, and Process Control XXXVIII
Research area
Semiconductors
Source type
Conference paper
DOI
10.1117/12.3010940

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Ying-Lin Chen; Jacob Deforce; Vic De Ridder; Bappaditya Dey; Victor M. Blanco Carballo; Sandip Halder; Philippe Leray. Towards improved semiconductor defect inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS. Metrology, Inspection, and Process Control XXXVIII. 2024-04-10. https://doi.org/10.1117/12.3010940

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