Plasma generator advances semiconductor chip manufacturing studies
Mara Johnson-Groh
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Scilight
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/10.0028276
The original publisher provides the full text and its access options.
Cite this source
Mara Johnson-Groh. Plasma generator advances semiconductor chip manufacturing studies. Scilight. 2024-08-06. https://doi.org/10.1063/10.0028276