Enhance the Electrical and Photoelectrical Performance of MoS 2 Transistor With Polyimide Gate Dielectric by Microwave Annealing
Yifei Zhang; Xing Su; Siwei Cui; Hui Yang; Dongping Wu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2024.3367311
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Cite this source
Yifei Zhang; Xing Su; Siwei Cui; Hui Yang; Dongping Wu. Enhance the Electrical and Photoelectrical Performance of MoS 2 Transistor With Polyimide Gate Dielectric by Microwave Annealing. IEEE Transactions on Electron Devices. 2024-04. https://doi.org/10.1109/ted.2024.3367311