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Research literature / Conference paper

Mapping of Semiconductor Electrical Properties with Terahertz Time-Domain Ellipsometry

Verdad C. Agulto; Toshiyuki Iwamoto; Zixi Zhao; Shuang Liu; Kosaku Kato; Makoto Nakajima

Published
Publisher
IEEE
Journal / collection
2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/irmmw-thz60956.2024.10697746

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Verdad C. Agulto; Toshiyuki Iwamoto; Zixi Zhao; Shuang Liu; Kosaku Kato; Makoto Nakajima. Mapping of Semiconductor Electrical Properties with Terahertz Time-Domain Ellipsometry. 2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). 2024-09-01. https://doi.org/10.1109/irmmw-thz60956.2024.10697746

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