Design of Partially High-Temperature Superconducting Planar Motor for Semiconductor Optical Lithography
Koichi Matsuda; Xueying Ma
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 CPSS & IEEE International Symposium on Energy Storage and Conversion (ISESC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/isesc63657.2024.10785339
The original publisher provides the full text and its access options.
Cite this source
Koichi Matsuda; Xueying Ma. Design of Partially High-Temperature Superconducting Planar Motor for Semiconductor Optical Lithography. 2024 CPSS & IEEE International Symposium on Energy Storage and Conversion (ISESC). 2024-11-08. https://doi.org/10.1109/isesc63657.2024.10785339