Semiconductor sensing surfaces via oxygen-injection treatment
Xiaowu Wang; Zhenggang Xue; Jiaqiang Xu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Materials Today Electronics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mtelec.2024.100120
The original publisher provides the full text and its access options.
Cite this source
Xiaowu Wang; Zhenggang Xue; Jiaqiang Xu. Semiconductor sensing surfaces via oxygen-injection treatment. Materials Today Electronics. 2024-12. https://doi.org/10.1016/j.mtelec.2024.100120