A Three-Dimensional Pipe Routing Problem in Semiconductor Fabrication Industry
Junghwa Lee; Wonhee Cho; Hyungjoo Cha; Taesu Cheong
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2025.3643596
The original publisher provides the full text and its access options.
Cite this source
Junghwa Lee; Wonhee Cho; Hyungjoo Cha; Taesu Cheong. A Three-Dimensional Pipe Routing Problem in Semiconductor Fabrication Industry. IEEE Access. 2025. https://doi.org/10.1109/access.2025.3643596