An Efficient Wafer Semiconductor Surface Defect Inspection Using Radial Basis Functional Neural Network
R. Dineshkumar; Komuravelly Sudheer Kumar; Chitra Murugan; Ramy Riad Al-Fatlawy; P Harshitha
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Second International Conference on Data Science and Information System (ICDSIS)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/icdsis61070.2024.10594056
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Cite this source
R. Dineshkumar; Komuravelly Sudheer Kumar; Chitra Murugan; Ramy Riad Al-Fatlawy; P Harshitha. An Efficient Wafer Semiconductor Surface Defect Inspection Using Radial Basis Functional Neural Network. 2024 Second International Conference on Data Science and Information System (ICDSIS). 2024-05-17. https://doi.org/10.1109/icdsis61070.2024.10594056