Design of Virtual Simulation Experiment for Semiconductor Oxidation Process Based on Unity3D
Zhang Zhiliang; Li Jindong; Zhao Limei; Sun Xiaodong
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 39th Youth Academic Annual Conference of Chinese Association of Automation (YAC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/yac63405.2024.10598611
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Cite this source
Zhang Zhiliang; Li Jindong; Zhao Limei; Sun Xiaodong. Design of Virtual Simulation Experiment for Semiconductor Oxidation Process Based on Unity3D. 2024 39th Youth Academic Annual Conference of Chinese Association of Automation (YAC). 2024-06-07. https://doi.org/10.1109/yac63405.2024.10598611