Sustainable Semiconductor Manufacturing: The Role of Lithography
Emily Gallagher; Lars-Åke Ragnarsson; Cedric Rolin
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2024.3416830
The original publisher provides the full text and its access options.
Cite this source
Emily Gallagher; Lars-Åke Ragnarsson; Cedric Rolin. Sustainable Semiconductor Manufacturing: The Role of Lithography. IEEE Transactions on Semiconductor Manufacturing. 2024-11. https://doi.org/10.1109/tsm.2024.3416830