Automated System for Cleaning Semiconductor Wafer
So-Young Kwon; Young-Hyung Kim; Jong-Ik Park; Young-Kwang Hwang; Jong-seok Lee
- Published
- Publisher
- Korean Institute of Information Technology
- Journal / collection
- The Journal of Korean Institute of Information Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.14801/jkiit.2024.22.9.61
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Cite this source
So-Young Kwon; Young-Hyung Kim; Jong-Ik Park; Young-Kwang Hwang; Jong-seok Lee. Automated System for Cleaning Semiconductor Wafer. The Journal of Korean Institute of Information Technology. 2024-09-30. https://doi.org/10.14801/jkiit.2024.22.9.61