Influence of FOUP Environment on Defects in Semiconductor Manufacturing
Weiwei Zhao; Honglin Chen; Yin Long; Kai Wang; Hao Guo
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic61820.2024.10531933
The original publisher provides the full text and its access options.
Cite this source
Weiwei Zhao; Honglin Chen; Yin Long; Kai Wang; Hao Guo. Influence of FOUP Environment on Defects in Semiconductor Manufacturing. 2024 Conference of Science and Technology for Integrated Circuits (CSTIC). 2024-03-17. https://doi.org/10.1109/cstic61820.2024.10531933