A Novel Semiconductor Piezoresistive Thin-Film Strain Gauge With High Sensitivity
Sijia Ling; Xiaopeng Chen; Lulu Miao; Jiawen Yin; Jiawen Jian; Qinghui Jin
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Sensors Journal
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/jsen.2024.3373635
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Cite this source
Sijia Ling; Xiaopeng Chen; Lulu Miao; Jiawen Yin; Jiawen Jian; Qinghui Jin. A Novel Semiconductor Piezoresistive Thin-Film Strain Gauge With High Sensitivity. IEEE Sensors Journal. 2024-05-01. https://doi.org/10.1109/jsen.2024.3373635