Microwave Effects on Metal–Semiconductor Contact of Heavily Nitrogen-Implanted Silicon
Wei-Chi Aeneas Hsu; Chang-Shan Shen; Ming-Chun Hsu; Tsun-Hsu Chang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2023.3347217
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Cite this source
Wei-Chi Aeneas Hsu; Chang-Shan Shen; Ming-Chun Hsu; Tsun-Hsu Chang. Microwave Effects on Metal–Semiconductor Contact of Heavily Nitrogen-Implanted Silicon. IEEE Transactions on Electron Devices. 2024-02. https://doi.org/10.1109/ted.2023.3347217