Indium-zinc-tin-oxide thin-film-transistor reliability enhancement using fluoridation with CF4 reactive sputtering
Ching-Lin Fan; Tzu-Chun Hsin; Xiang-Wei Yu; Zhe-Chen Lin
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Materials Science in Semiconductor Processing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mssp.2023.108068
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Cite this source
Ching-Lin Fan; Tzu-Chun Hsin; Xiang-Wei Yu; Zhe-Chen Lin. Indium-zinc-tin-oxide thin-film-transistor reliability enhancement using fluoridation with CF4 reactive sputtering. Materials Science in Semiconductor Processing. 2024-03. https://doi.org/10.1016/j.mssp.2023.108068