Nb Contacts for Thermally-Stable High-Performance Logic and Memory Peripheral Transistor
R. Sarkar; R. Ritzenthaler; J. Everaert; P. Eyben; K. Sankaran; C. Porret; P. Gupta; J. Ganguly; H. Arimura; J. Geypen; E. Capogreco; S. Roh; V. Machkaoutsan; L. PB. Lima; M-S. Kim; A. Spessot; N. Horiguchi
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE International Electron Devices Meeting (IEDM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/iedm50854.2024.10873566
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Cite this source
R. Sarkar; R. Ritzenthaler; J. Everaert; P. Eyben; K. Sankaran; C. Porret; P. Gupta; J. Ganguly; H. Arimura; J. Geypen; E. Capogreco; S. Roh; V. Machkaoutsan; L. PB. Lima; M-S. Kim; A. Spessot; N. Horiguchi. Nb Contacts for Thermally-Stable High-Performance Logic and Memory Peripheral Transistor. 2024 IEEE International Electron Devices Meeting (IEDM). 2024-12-07. https://doi.org/10.1109/iedm50854.2024.10873566