FDSOI transistor-based uncooled microbolometer: demonstration of a 12µm pixel sensitive to IR flux
Antoine Albouy; Geoffroy Dumont; Mélanie Le Cocq; Claire Vialle; Romain M.R. Kubica; Laurent Carle; Valérie Goudon; Thomas Perrillat-Bottonet; Jean-Jacques Yon; Patrick Leduc
- Published
- Publisher
- SPIE
- Journal / collection
- Infrared Technology and Applications L
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3013449
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Cite this source
Antoine Albouy; Geoffroy Dumont; Mélanie Le Cocq; Claire Vialle; Romain M.R. Kubica; Laurent Carle; Valérie Goudon; Thomas Perrillat-Bottonet; Jean-Jacques Yon; Patrick Leduc. FDSOI transistor-based uncooled microbolometer: demonstration of a 12µm pixel sensitive to IR flux. Infrared Technology and Applications L. 2024-06-07. https://doi.org/10.1117/12.3013449