Bionic-Driven Intelligent Detection of Surface Defects on Semiconductor Silicon Wafers
Weisheng Cheng; Zexiao Li; Juncheng Yu; Fuqi Sun; Shuangxiong Yin; xiaodong Zhang
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5537139
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Cite this source
Weisheng Cheng; Zexiao Li; Juncheng Yu; Fuqi Sun; Shuangxiong Yin; xiaodong Zhang. Bionic-Driven Intelligent Detection of Surface Defects on Semiconductor Silicon Wafers. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5537139