Virtual metrology for chemical mechanical planarization of semiconductor wafers
Balamurugan Deivendran; Vishnu Swaroopji Masampally; Naga Ravikumar Varma Nadimpalli; Venkataramana Runkana
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Intelligent Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s10845-024-02335-0
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Cite this source
Balamurugan Deivendran; Vishnu Swaroopji Masampally; Naga Ravikumar Varma Nadimpalli; Venkataramana Runkana. Virtual metrology for chemical mechanical planarization of semiconductor wafers. Journal of Intelligent Manufacturing. 2024-03-13. https://doi.org/10.1007/s10845-024-02335-0