Low-cost energy-efficient EUV lithography for advanced semiconductor manufacturing
Tsumoru Shintake; Patrick Naulleau
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Nature Reviews Electrical Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s44287-024-00129-3
The original publisher provides the full text and its access options.
Cite this source
Tsumoru Shintake; Patrick Naulleau. Low-cost energy-efficient EUV lithography for advanced semiconductor manufacturing. Nature Reviews Electrical Engineering. 2025-01-03. https://doi.org/10.1038/s44287-024-00129-3