Application of DP-MD methodology in ion implantation for wide bandgap power semiconductor materials
Jiashu Chen; Junhua Li; Xinyu Xiao; Haoyu Qiao; Jiaofen Yang; Ping Peng; Jing Xiao; Ming Tao; Jie Liu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Surfaces and Interfaces
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.surfin.2025.106140
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Cite this source
Jiashu Chen; Junhua Li; Xinyu Xiao; Haoyu Qiao; Jiaofen Yang; Ping Peng; Jing Xiao; Ming Tao; Jie Liu. Application of DP-MD methodology in ion implantation for wide bandgap power semiconductor materials. Surfaces and Interfaces. 2025-04. https://doi.org/10.1016/j.surfin.2025.106140