Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing
Tianhui Wang; Jaeseung Baek; Myong-Kee Jeong; Seongho Seo; Jaekyung Choi
- Published
- Publisher
- Informa UK Limited
- Journal / collection
- International Journal of Production Research
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1080/00207543.2024.2318490
The original publisher provides the full text and its access options.
Cite this source
Tianhui Wang; Jaeseung Baek; Myong-Kee Jeong; Seongho Seo; Jaekyung Choi. Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing. International Journal of Production Research. 2024-03. https://doi.org/10.1080/00207543.2024.2318490