On the applications of additive manufacturing in semiconductor manufacturing equipment
Jiahui Ye; Ahmed El Desouky; Alaa Elwany
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Processes
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmapro.2024.05.054
The original publisher provides the full text and its access options.
Cite this source
Jiahui Ye; Ahmed El Desouky; Alaa Elwany. On the applications of additive manufacturing in semiconductor manufacturing equipment. Journal of Manufacturing Processes. 2024-08. https://doi.org/10.1016/j.jmapro.2024.05.054