Augmenting Metrology: A Framework for Interactive 3D Data Visualization and Contextual Analysis in Semiconductor Manufacturing
Md Ashiqur Rahman Laskar; Mohammad Zaid Kathadi; Md Fuad Hossain; Srijan Chakrabarti; Filippo Ozino Caligaris; Giuseppe Leonetti; Gianluca Milano; Umberto Celano
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/ipfa61654.2024.10691140
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Cite this source
Md Ashiqur Rahman Laskar; Mohammad Zaid Kathadi; Md Fuad Hossain; Srijan Chakrabarti; Filippo Ozino Caligaris; Giuseppe Leonetti; Gianluca Milano; Umberto Celano. Augmenting Metrology: A Framework for Interactive 3D Data Visualization and Contextual Analysis in Semiconductor Manufacturing. 2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). 2024-07-15. https://doi.org/10.1109/ipfa61654.2024.10691140