Exploring Machine Learning for Semiconductor Process Optimization: A Systematic Review
Ying-Lin Chen; Sara Sacchi; Bappaditya Dey; Victor Blanco; Philippe Leray; Sandip Halder; Stefan De Gendt
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Research area
- AI & compute
- Source type
- Preprint / posted paper
- DOI
- 10.36227/techrxiv.172114788.85190557/v1
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Ying-Lin Chen; Sara Sacchi; Bappaditya Dey; Victor Blanco; Philippe Leray; Sandip Halder; Stefan De Gendt. Exploring Machine Learning for Semiconductor Process Optimization: A Systematic Review. Institute of Electrical and Electronics Engineers (IEEE). 2024-07-16. https://doi.org/10.36227/techrxiv.172114788.85190557/v1