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Research literature / Conference paper

Fast Temperature Control in Semiconductor Vertical Furnace with Time-Optimal Control and Iterative Experiments

Christian Milleneuve Budiono; Akira Hirata; Tatsuya Yamaguchi; Takafumi Koseki; Wataru Ohnishi

Published
Publisher
IEEE
Journal / collection
2024 International Symposium on Semiconductor Manufacturing (ISSM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/issm64832.2024.10874975

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Christian Milleneuve Budiono; Akira Hirata; Tatsuya Yamaguchi; Takafumi Koseki; Wataru Ohnishi. Fast Temperature Control in Semiconductor Vertical Furnace with Time-Optimal Control and Iterative Experiments. 2024 International Symposium on Semiconductor Manufacturing (ISSM). 2024-12-09. https://doi.org/10.1109/issm64832.2024.10874975

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