AI driven Process Diagnostic & Control: Device Manufacturing
Jaeyong Park
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1109/edtm58488.2024.10511639
The original publisher provides the full text and its access options.
Cite this source
Jaeyong Park. AI driven Process Diagnostic & Control: Device Manufacturing. 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2024-03-03. https://doi.org/10.1109/edtm58488.2024.10511639