Monitoring Semiconductor Residue Deposits Using Graph Neural Networks
Minho Jeon; Anil Kumar Khambampati; Keun Joong Yoon; Jong Hyun Song; Seok Jun Ko; Kyung Youn Kim
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 International Conference on Electronics, Information, and Communication (ICEIC)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/iceic64972.2025.10879638
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Cite this source
Minho Jeon; Anil Kumar Khambampati; Keun Joong Yoon; Jong Hyun Song; Seok Jun Ko; Kyung Youn Kim. Monitoring Semiconductor Residue Deposits Using Graph Neural Networks. 2025 International Conference on Electronics, Information, and Communication (ICEIC). 2025-01-19. https://doi.org/10.1109/iceic64972.2025.10879638