Large-Scale Delayering of Semiconductor Devices with Nanometer-Scale Uniformity over a Millimeter-Scale Area
P. Nowakowski; J. Liu; M. Boccabella; M. Ray; P. Fischione
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Failure Analysis and Prevention
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s11668-024-02024-3
The original publisher provides the full text and its access options.
Cite this source
P. Nowakowski; J. Liu; M. Boccabella; M. Ray; P. Fischione. Large-Scale Delayering of Semiconductor Devices with Nanometer-Scale Uniformity over a Millimeter-Scale Area. Journal of Failure Analysis and Prevention. 2024-08-28. https://doi.org/10.1007/s11668-024-02024-3