Effect of vacuum annealing on indium tin oxide transistor with nanometer-thin channel
Qingguo Gao; Jiabing Li; Tianfan Cao; Xinjian Pan; Ping Liu; Liming Liu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Vacuum
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.vacuum.2024.113016
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Cite this source
Qingguo Gao; Jiabing Li; Tianfan Cao; Xinjian Pan; Ping Liu; Liming Liu. Effect of vacuum annealing on indium tin oxide transistor with nanometer-thin channel. Vacuum. 2024-04. https://doi.org/10.1016/j.vacuum.2024.113016