Implementation of sub-100 nm vertical channel-all-around (CAA) thin-film transistor using thermal atomic layer deposited IGZO channel
Yuting Chen; Xinlv Duan; Xueli Ma; Peng Yuan; Zhengying Jiao; Yongqing Shen; Liguo Chai; Qingjie Luan; Jinjuan Xiang; Di Geng; Guilei Wang; Chao Zhao
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Semiconductors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1674-4926/24010032
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Cite this source
Yuting Chen; Xinlv Duan; Xueli Ma; Peng Yuan; Zhengying Jiao; Yongqing Shen; Liguo Chai; Qingjie Luan; Jinjuan Xiang; Di Geng; Guilei Wang; Chao Zhao. Implementation of sub-100 nm vertical channel-all-around (CAA) thin-film transistor using thermal atomic layer deposited IGZO channel. Journal of Semiconductors. 2024-07-01. https://doi.org/10.1088/1674-4926/24010032