Research Trends of Atomic Layer Deposition of Metal Nitrides and Their Applications in Semiconductor Industry
Jayeong Lee; Boyun Choi; Junhyeok Ahn; Nari Jeon
- Published
- Publisher
- Ceramist
- Journal / collection
- Ceramist
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.31613/ceramist.2024.27.1.04
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Cite this source
Jayeong Lee; Boyun Choi; Junhyeok Ahn; Nari Jeon. Research Trends of Atomic Layer Deposition of Metal Nitrides and Their Applications in Semiconductor Industry. Ceramist. 2024-03-31. https://doi.org/10.31613/ceramist.2024.27.1.04