A Study of Deposition/Annealing Cyclic Method to Enhance the Performance of Zinc-Tin Oxide Thin-Film Transistor by Ultrasonic Spray Pyrolysis Deposition
Hao-Chun Hung; Hung-Chi Chang; Fang-Yu Chang; Han-Yin Liu; Wei-Chou Hsu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2024.3353167
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Cite this source
Hao-Chun Hung; Hung-Chi Chang; Fang-Yu Chang; Han-Yin Liu; Wei-Chou Hsu. A Study of Deposition/Annealing Cyclic Method to Enhance the Performance of Zinc-Tin Oxide Thin-Film Transistor by Ultrasonic Spray Pyrolysis Deposition. IEEE Transactions on Electron Devices. 2024-03. https://doi.org/10.1109/ted.2024.3353167