A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems
Nahid Hosseini; Matthias Neuenschwander; Jonathan D. Adams; Santiago H. Andany; Oliver Peric; Marcel Winhold; Maria Carmen Giordano; Vinayak Shantaram Bhat; Marcos Penedo; Dirk Grundler; Georg E. Fantner
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Nature Electronics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41928-024-01195-z
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Cite this source
Nahid Hosseini; Matthias Neuenschwander; Jonathan D. Adams; Santiago H. Andany; Oliver Peric; Marcel Winhold; Maria Carmen Giordano; Vinayak Shantaram Bhat; Marcos Penedo; Dirk Grundler; Georg E. Fantner. A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems. Nature Electronics. 2024-07-15. https://doi.org/10.1038/s41928-024-01195-z