Advancing semiconductor defect detection with integrated deep learning and color scale preprocessing
Zheng Lan; Wei Zhao; Xiupeng Shi
- Published
- Publisher
- SPIE
- Journal / collection
- Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1117/12.3052800
The original publisher provides the full text and its access options.
Cite this source
Zheng Lan; Wei Zhao; Xiupeng Shi. Advancing semiconductor defect detection with integrated deep learning and color scale preprocessing. Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024). 2024-12-10. https://doi.org/10.1117/12.3052800