Industrial data space application framework for semiconductor wafer manufacturing system scheduling
Da Chen; Jie Zhang; Lihui Wu; Peng Zhang; Ming Wang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2024.09.013
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Cite this source
Da Chen; Jie Zhang; Lihui Wu; Peng Zhang; Ming Wang. Industrial data space application framework for semiconductor wafer manufacturing system scheduling. Journal of Manufacturing Systems. 2024-12. https://doi.org/10.1016/j.jmsy.2024.09.013