TCAD model of GAA Nanowire Transistor with silicon oxide/nitride/oxide dielectric
Rostislav Rusev; Ivelina Ruskova; George Angelov; Dimitar Nikolov; Elitsa Gieva; Rossen Radonov; Dorian Minkov
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 47th International Spring Seminar on Electronics Technology (ISSE)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/isse61612.2024.10603736
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Cite this source
Rostislav Rusev; Ivelina Ruskova; George Angelov; Dimitar Nikolov; Elitsa Gieva; Rossen Radonov; Dorian Minkov. TCAD model of GAA Nanowire Transistor with silicon oxide/nitride/oxide dielectric. 2024 47th International Spring Seminar on Electronics Technology (ISSE). 2024-05-15. https://doi.org/10.1109/isse61612.2024.10603736