A 2-DOF piezoelectric platform for cross-scale semiconductor inspection
Lusheng Yuan; Liang Wang; Rui Qi; Yan Li; Chuangye Liu; Gang Luo
- Published
- Publisher
- Elsevier BV
- Journal / collection
- International Journal of Mechanical Sciences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ijmecsci.2024.109765
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Cite this source
Lusheng Yuan; Liang Wang; Rui Qi; Yan Li; Chuangye Liu; Gang Luo. A 2-DOF piezoelectric platform for cross-scale semiconductor inspection. International Journal of Mechanical Sciences. 2024-12. https://doi.org/10.1016/j.ijmecsci.2024.109765