Design of a -120℃ Mixed Refrigerant Refrigerator System for Cryogenic Semiconductor Etching Process
Hyung-Yong Ji; Cheonkyu Lee
- Published
- Publisher
- The Korea Society for Power System Engineering
- Journal / collection
- Journal of Power System Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.9726/kspse.2024.28.6.063
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Cite this source
Hyung-Yong Ji; Cheonkyu Lee. Design of a -120℃ Mixed Refrigerant Refrigerator System for Cryogenic Semiconductor Etching Process. Journal of Power System Engineering. 2024-12-31. https://doi.org/10.9726/kspse.2024.28.6.063