Semiconductor Dry Etching Innovation in the Era of 3D Monolithic Integration
Thorsten Lill; Andreas Fischer
- Published
- Publisher
- The Electrochemical Society
- Journal / collection
- The Electrochemical Society Interface
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1149/2.f14244if
The original publisher provides the full text and its access options.
Cite this source
Thorsten Lill; Andreas Fischer. Semiconductor Dry Etching Innovation in the Era of 3D Monolithic Integration. The Electrochemical Society Interface. 2024-12-01. https://doi.org/10.1149/2.f14244if