Atomic layer deposition and application of group III nitrides semiconductor and their alloys
Peng Qiu; Heng Liu; Xiao-Li Zhu; Feng Tian; Meng-Chao Du; Hong-Yu Qiu; Guan-Liang Chen; Yu-Yu Hu; De-Lin Kong; Jin Yang; Hui-Yun Wei; Ming-Zeng Peng; Xin-He Zheng; School of Mathematics and Physics, Beijing Key Laboratory for Magneto-Photoelectrical Composite and Interface Science, University of Science and Technology Beijing, Beijing 100083, China
- Published
- Publisher
- Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
- Journal / collection
- Acta Physica Sinica
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7498/aps.73.20230832
The original publisher provides the full text and its access options.
Cite this source
Peng Qiu; Heng Liu; Xiao-Li Zhu; Feng Tian; Meng-Chao Du; Hong-Yu Qiu; Guan-Liang Chen; Yu-Yu Hu; De-Lin Kong; Jin Yang; Hui-Yun Wei; Ming-Zeng Peng; Xin-He Zheng; School of Mathematics and Physics, Beijing Key Laboratory for Magneto-Photoelectrical Composite and Interface Science, University of Science and Technology Beijing, Beijing 100083, China. Atomic layer deposition and application of group III nitrides semiconductor and their alloys. Acta Physica Sinica. 2024. https://doi.org/10.7498/aps.73.20230832