Enhanced Fault Detection in Semiconductor Wafers Using Multisensor Data Fusion and Machine Learning Techniques
Sourav Mehta; Nadeem Rao
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Second International Conference on Intelligent Cyber Physical Systems and Internet of Things (ICoICI)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/icoici62503.2024.10696519
The original publisher provides the full text and its access options.
Cite this source
Sourav Mehta; Nadeem Rao. Enhanced Fault Detection in Semiconductor Wafers Using Multisensor Data Fusion and Machine Learning Techniques. 2024 Second International Conference on Intelligent Cyber Physical Systems and Internet of Things (ICoICI). 2024-08-28. https://doi.org/10.1109/icoici62503.2024.10696519