Emerging Perfluorobutane Sulfonamido Derivatives as a New Trend of Surfactants Used in the Semiconductor Industry
Yi-Ju Chen; Ren-De Wang; Yu-Lin Shih; Hsiao-Yi Chin; Angela Yu-Chen Lin
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- Environmental Science & Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acs.est.3c04435
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Cite this source
Yi-Ju Chen; Ren-De Wang; Yu-Lin Shih; Hsiao-Yi Chin; Angela Yu-Chen Lin. Emerging Perfluorobutane Sulfonamido Derivatives as a New Trend of Surfactants Used in the Semiconductor Industry. Environmental Science & Technology. 2024-01-04. https://doi.org/10.1021/acs.est.3c04435