BEOL Compatible Ultra-Thin ITO Transistor With Performance Recoverable Capability by in Situ Electrothermal Annealing
Baifan Qian; Xianghui Li; Yongkai Liu; Siwei Wang; Jialin Meng; Tianyu Wang; Qingqing Sun; David Wei Zhang; Lin Chen
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Electron Device Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/led.2024.3382156
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Cite this source
Baifan Qian; Xianghui Li; Yongkai Liu; Siwei Wang; Jialin Meng; Tianyu Wang; Qingqing Sun; David Wei Zhang; Lin Chen. BEOL Compatible Ultra-Thin ITO Transistor With Performance Recoverable Capability by in Situ Electrothermal Annealing. IEEE Electron Device Letters. 2024-05. https://doi.org/10.1109/led.2024.3382156