Laser dicing of semiconductor wafers: Research status and current challenges
He Cao; Yunfei Li; Gong Wang; Ziqi Tang; Derong Sun; Hongwei Yin; Yu Yu; Chengbin Shen; Yulei Wang; Zhiwei Lu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Optics and Lasers in Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.optlaseng.2024.108786
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Cite this source
He Cao; Yunfei Li; Gong Wang; Ziqi Tang; Derong Sun; Hongwei Yin; Yu Yu; Chengbin Shen; Yulei Wang; Zhiwei Lu. Laser dicing of semiconductor wafers: Research status and current challenges. Optics and Lasers in Engineering. 2025-03. https://doi.org/10.1016/j.optlaseng.2024.108786