Thermal processing in semiconductor implant annealing: Historical and technological evolution
Silke Hamm; Alexandr Cosceev; Christian Pfahler; Michael Storek; Ikbal Varol; Shreyashi Ganguly; Kartik Shah; Martin Albrecht; Matthias Bauer
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- MRS Advances
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1557/s43580-025-01202-1
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Cite this source
Silke Hamm; Alexandr Cosceev; Christian Pfahler; Michael Storek; Ikbal Varol; Shreyashi Ganguly; Kartik Shah; Martin Albrecht; Matthias Bauer. Thermal processing in semiconductor implant annealing: Historical and technological evolution. MRS Advances. 2025-03-12. https://doi.org/10.1557/s43580-025-01202-1