Hierarchical severity-aware multi-task learning framework for progressive fault diagnosis in semiconductor transfer robots
Youngkyoung Ji; Kihyun Kim; Hyo-Young Kim
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Processes
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmapro.2026.09.028
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Cite this source
Youngkyoung Ji; Kihyun Kim; Hyo-Young Kim. Hierarchical severity-aware multi-task learning framework for progressive fault diagnosis in semiconductor transfer robots. Journal of Manufacturing Processes. 2026-10. https://doi.org/10.1016/j.jmapro.2026.09.028